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Instructors: Dr. rer. nat. Leopoldo Molina-Luna
Event type:
Lecture
Org-unit: Dept. 11 - Institute of Materials Science
Displayed in timetable as:
Focused Ion Beam Mic
Subject:
Crediting for:
Hours per week:
2
Language of instruction:
Englisch
Min. | Max. participants:
- | -
Course Contents:
The focused ion beam (FIB) microscope has gained widespread use in the materials sciences over the last several years and has become an indispensable tool for materials characterization and micromachining. This lecture will cover the basics and applications of focused ion beam microscopy relevant for the materials sciences: (a) ion sources, (b) ion optics, (c) ion-solid interaction, (d) ion milling, sputtering and deposition, (e) scanning ion microscopy, (f) simulation of the transport of ions in matter, and (g) applications including focused ion beam lithography and micromachining.
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